Teacher Profiles

HARA, Akito Professor (Semiconductor Materials and Device Engineering Laboratory)

Research topic

• Development of innovative semiconductor devices for next-generation IoT using micro/nanotechnology
  • Development of high-performance nanofilm transistors on plastic substrates for flexible devices
  • Development of low-voltage operating nanofilm transistors on glass substrates
  • Development of novel nanofilm transistors using ferroelectric materials
  • Development of semiconductor sensors for a trillion-sensor society
  • Development of 3D thin-film transistors
• Electronic properties of nanostructures in semiconductors
• Development of a new gettering technology in semiconductors

Career

performance

Books authored (9 books)

• "Semiconductor Engineering: A Beginner's Guide"
  Akito Hara
  Kodansha Scientific
  ISBN: 978-4-06-528292-2 (2022)
• "Heavy metal gettering in silicon"
  Masaki Aoki, Akihito Hara: Semiconductor Research, Vol. 42, Chapter 9 (Kogyo Chosakai, edited by Jun-ichi Nishizawa, 1996), pp. 231-257.
• "Behavior of light element impurities in CZ-Si crystals"
  Akihito Hara, Masaki Aoki, Tetsuo Fukuda, and Akira Osawa: Semiconductor Research, Vol. 38, Chapter 9 (Kogyo Chosakai, edited by Jun-ichi Nishizawa, 1993), pp. 263-285.

Six other results (see researchmap).

Original papers (last 5 years)

• "CMOS inverter on flexible plastic substrate using junctionless double-gate polycrystalline Ge thin-film transistors fabricated via Cu-based metal-induced crystallization"
  Akito Kurihara, Tetsuo Okuyama, Toshiyuki Tsuchiya, and Akito Hara, Jpn. J. Appl. Phys. 65,101002(2026).
• "Hybrid CMOS inverter comprising polycrystalline germanium and oxide thin-film transistors on a plastic substrate"
  Akito Kurihara, Tetsuo Okuyama, Toshiyuki Tsuchiya, and Akito Hara, Jpn. J. Appl. Phys. 64,12SP21(2025).
• "Vertical four-terminal polycrystalline-silicon thin-film transistors with high-k gate dielectric on glass substrates"
  Kosei Suzuki and Akito Hara, Jpn. J. Appl. Phys. 64 (2025) 061004.
• "Heterogeneous monolithic complementary thin-film transistor with n-channel polycrystalline-silicon and upper p-channel double-gate polycrystalline-germanium thin-film transistors on a glass substrate"
  Yuto Ito, Daiki Goshima, Akito Kurihara, and Akito Hara, Jpn. J. Appl. Phys. 64 (2025) 01SP24.
• "Four-Terminal Polycrystalline-Silicon Vertical Thin-Film Transistors on Glass Substrates for pH Sensor Applications"
  Kosei Suzuki, Masahide Nitta, Tetsuo Tabei, Akito Hara, ECS Trans. 114 (2024) 49.
• "Performance evaluation of polycrystalline Si1-xGex thin-film transistors fabricated by continuous-wave laser lateral crystallization on glass substrates"
  Tatsuya Sagawa, Kuninori Kitahara and Akito Hara, Jpn. J. Appl. Phys. 63 (2024).
• "Evaluation of extremely thin polycrystalline germanium films and their TFT performance fabricated at 400 ℃ by Cu-induced crystallization on a glass substrate"
  Sho Suzuki and Akito Hara, Jpn. J. Appl. Phys. 63 (2024) 051001.
• "Four-terminal polycrystalline-silicon vertical thin-film transistors on glass substrates"
  Kosei Suzuki, Kotaro Kusunoki, Yuto Ito, and Akito Hara, Jpn. J. Appl. Phys. 63 (2024) 041002.
• (Invited) "Evaluation of Polycrystalline-Si1-XGex Thin-Film Transistors Grown Laterally on a Glass Substrate Using a Continuous-Wave Laser"
  Akito Hara, Tatsuya Sagawa, Kotaro Kusunoki and Kuninor Kitahara, ECS Trans.109 (2022) 59.

Since the establishment of the laboratory (April 2006), there have been 36 original English research papers in which members of this laboratory are the first author, corresponding author (or contact person).

• "CMOS inverter on flexible plastic substrate using junctionless double-gate polycrystalline Ge thin-film transistors fabricated via Cu-based metal-induced crystallization"
  Akito Kurihara, Tetsuo Okuyama, Toshiyuki Tsuchiya, and Akito Hara, Jpn. J. Appl. Phys. 65,101002(2026).
• "Hybrid CMOS inverter comprising polycrystalline germanium and oxide thin-film transistors on a plastic substrate"
  Akito Kurihara, Tetsuo Okuyama, Toshiyuki Tsuchiya, and Akito Hara, Jpn. J. Appl. Phys. 64,12SP21(2025).
• "Vertical four-terminal polycrystalline-silicon thin-film transistors with high-k gate dielectric on glass substrates"
  Kosei Suzuki and Akito Hara, Jpn. J. Appl. Phys. 64 (2025) 061004.
• "Heterogeneous monolithic complementary thin-film transistor with n-channel polycrystalline-silicon and upper p-channel double-gate polycrystalline-germanium thin-film transistors on a glass substrate"
  Yuto Ito, Daiki Goshima, Akito Kurihara, and Akito Hara, Jpn. J. Appl. Phys. 64 (2025) 01SP24.
• "Four-Terminal Polycrystalline-Silicon Vertical Thin-Film Transistors on Glass Substrates for pH Sensor Applications"
  Kosei Suzuki, Masahide Nitta, Tetsuo Tabei, Akito Hara, ECS Trans. 114 (2024) 49.
• "Performance evaluation of polycrystalline Si1-xGex thin-film transistors fabricated by continuous-wave laser lateral crystallization on glass substrates"
  Tatsuya Sagawa, Kuninori Kitahara and Akito Hara, Jpn. J. Appl. Phys. 63 (2024).
• "Evaluation of extremely thin polycrystalline germanium films and their TFT performance fabricated at 400 ℃ by Cu-induced crystallization on a glass substrate"
  Sho Suzuki and Akito Hara, Jpn. J. Appl. Phys. 63 (2024) 051001.
• "Four-terminal polycrystalline-silicon vertical thin-film transistors on glass substrates"
  Kosei Suzuki, Kotaro Kusunoki, Yuto Ito, and Akito Hara, Jpn. J. Appl. Phys. 63 (2024) 041002.
• (Invited) "Evaluation of Polycrystalline-Si1-XGex Thin-Film Transistors Grown Laterally on a Glass Substrate Using a Continuous-Wave Laser"
  Akito Hara, Tatsuya Sagawa, Kotaro Kusunoki and Kuninor Kitahara, ECS Trans.109 (2022) 59.
• "Crystallization of Cu-doped thin Ge film assisted with a Cu–Ge droplet"
  Akito Hara, Hitoshi Suzuki, Hiroki Utsumi, Ryo Miyazaki and Kuninori Kitahara, Jpn.J.Appl.Phys.59 (2020) 088004.
• “Four-terminal polycrystalline Ge1-xSnx thin-film transistors using copper-induced crystallization on glass substrates and their application to enhancement/depletion inverters”
  Ryo Miyazaki and Akito Hara, Jpn. J. Appl. Phys. 59 (2020) 051008.
• “Double-gate polycrystalline-germanium thin-film transistors using copper-induced crystallization on flexible plastic substrate”
  Hiroki Utsumi, Naoki Nishiguchi, Ryo Miyazaki, Hitoshi Suzuki, Kuninori Kitahara and Akito Hara, Jpn. J. Appl. Phys. 58 (2019) 046501.
• "Ground state of ultrashallow thermal donors in silicon"
  Akito Hara and Teruyoshi Awano: Jpn. J. Appl. Phys. 57 (2018) 101301.
• "Performance of four-terminal low-temperature polycrystalline-silicon thin-film transistors and their application in CMOS inverters on glass substrates"
  Hiroki Ohsawa, Hiroki Utsumi and Akito Hara: Jpn. J. Appl. Phys. 57 (2018) 03DB01.
• "Ground-state splitting of ultrashallow thermal donors with negative central-cell corrections in silicon"
  Akito Hara and Teruyoshi Awano: Jpn. J. Appl. Phys. 56 (2017) 068001.
• "Low-Temperature Polycrystalline-Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization and Metal/Hafnium Oxide Gate Stack on Nonalkaline Glass Substrate"
  Tatsuya MEGURO and Akito HARA: IEICE TRANSACTIONS on Electronics E100-C (2017) 94.
• "Self-aligned metal double-gate junctionless p-channel low-temperature polycrystalline-germanium thin-film transistor with thin germanium film on glass substrate"
  Akito Hara, Yuya Nishimura and Hiroki Ohsawa:Jpn. J. Appl. Phys. 56 (2017) 03BB01.
• (Invited) "Self-Aligned Four-Terminal Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Continuous-Wave Laser Lateral Crystallization"
  Akito Hara and Hiroki Ohsawa: ECS Trans. 75 (2016) 37.
• "Extended-Gate pH Sensors Using Self-Aligned Four-Terminal Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate"
  Hiroki Ohsawa and Akito Hara: ECS Trans. 75 (2016) 253.
• "Controllability of self-aligned four-terminal planar embedded metal double-gate low-temperature polycrystalline-silicon thin-film transistors on a glass substrate"
  Hiroki Ohsawa, Shun Sasaki and Akito Hara: Jpn. J. Appl. Phys. 55 (2016) 03CC01.
• "Mechanism of formation of ultrashallow thermal donors in carbon-doped oxygen-rich monocrystalline silicon preannealed to introduce hydrogen"
  Akito Hara and Teruyoshi Awano: Jpn. J. Appl. Phys. 54 (2015) 101302.
• (Invited) "High-Performance Top-Gate and Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors Fabricated Using Continuous-Wave-Laser Lateral Crystallization on a Glass Substrate"
  Akito Hara, Tatsuya Meguro, Shun Sasaki, and Hiroki Ohsawa: ECS Transactions 67 (2015) 79.
• "Highly oriented lateral growth of SiGe thin films on glass induced by constitutional undercooling"
  Kuninori Kitahara, Kazuya Shibutani, Yasunori Okabe, Tatsuya Meguro and Akito Hara: Jpn. J. Appl. Phys. 54 (2015) 021302.
• (Invited Paper) "Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors for System-on-Glass"
  Akito HARA, Shinya KAMO, Tadashi SATO: IEICE TRANSACTIONS on Electronics E97-C (2014) 1048.
• “Impact of the Hydrogenation Process on the Performance of Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors”
  Yusuke Shika, Takuro Bessho, Yasunori Okabe, Hiroyuki Ogata, Shinya Kamo, Kuninori Kitahara, Akito Hara: Jpn. J. Appl. Phys. 52 (2013) 03BB01.
• “Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate”
  Hiroyuki Ogata, Kenji Ichijo, Kenji Kondo, Akito Hara: IEICE TRANSACTIONS ON ELECTRONICS E96C (2013) 285.
• “Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Back-Surface Exposure”
  Akito Hara, Tadashi Sato, Kenji Kondo, Kenta Hirose, Kuninori Kitahara: Jpn. J. Appl. Phys. 50 (2011) 021401.
• “Structural Elements of Ultrashallow Thermal Donors Formed in Silicon Crystals”
  Akito Hara, Teruyoshi Awano, Yutaka Ohno, Ichiro Yonenaga: Jpn. J. Appl. Phys. 49 (2010) 050203.
• “Getting in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate”
  Akito Hara and Tsutomu Sato: Jpn. J. Appl. Phys. 49 (2010) 010203.
• "Fabrication of Large Lateral Polycrystalline Silicon Film by Laser Dehydrogenation and Lateral Crystallization of Hydrogenated Nanocrystalline Silicon Films"
  Tadashi Sato, Kenichi Yamamoto, Junji Kambara, Kuninori Kitahara, Akito Hara: Jpn. J. Appl. Phys. 48 (2009)121201.
• "Observation of Dislocation Motion in Si1-xGex Thin Film on Si Substrate by Laser Scattering Method"
  Akito Hara, Naoyoshi Tamura, Tomoji Nakamura: Jap. J. Appl. Phys. 48 (2009) 020204.
• "Effect of phosphorous implantation on threading dislocation motions in SiGe/Si heterostructures"
  Akito Hara: J. Appl. Phys.104 (2008) 076105.
• "An experimental approach to form selective single-crystalline silicon on nonalkaline glass using self-aligned heat rese rvoirs and continuous-wave green-laser lateral crystallization"
  Akito Hara: THIN SOLID FILMS 516 (2008) 7350.
• "Effect of ion implantation on dislocation motion in SiGe/Si heterostructure"
  Akito Hara, Naoyoshi Tamura, Tomoji Nakamura: Jpn. J. Appl. Phys. 46 (2007) 3524.
• "Diffusion coefficient of hydrogen in silicon at an intermediate temperature"
  Akito Hara: Jpn. J. Appl. Phys. 46 (2007) 962.
• "Structural elements of shallow thermal donors formed in nitrogen-gas-doped silicon crystals"
  Akito Hara: Jpn. J. Appl. Phys. 46 (2007) 463.

Patents (53)

<United States Patent (21 cases)>

• United States Patent 8,264,012
  “Semiconductor device and manufacturing method thereof“
  Akito Hara

20 other results (see researchmap)

<Domestic Registered Patents (32 cases)>

• Patent No. 7045005 (March 23, 2022)
  Semiconductor equipment
  Akito Hara

31 other results (see researchmap)

Invited academic papers and invited lecture papers (5 papers)

• "Evaluation of Polycrystalline-Si1-XGex Thin-Film Transistors Grown Laterally on a Glass Substrate Using a Continuous-Wave Laser"
  Akito Hara, Tatsuya Sagawa, Kotaro Kusunoki and Kuninor Kitahara, ECS Trans.109 (2022) 59.
• "Self-Aligned Four-Terminal Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Continuous-Wave Laser Lateral Crystallization"
  Akito Hara and Hiroki Ohsawa: ECS Trans. 75 (2016) 37.
• "High-Performance Top-Gate and Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors Fabricated Using Continuous-Wave-Laser Lateral Crystallization on a Glass Substrate"
  Akito Hara, Tatsuya Meguro, Shun Sasaki, and Hiroki Ohsawa: ECS Transactions 67 (2015) 79.
• "Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors for System-on-Glass"
  Akito HARA, Shinya KAMO, Tadashi SATO: IEICE TRANSACTIONS on Electronics E97-C (2014) 1048.
• "New low-temperature poly-Si TFT technology with mobility exceeding 500 cm²/Vs using CW lateral crystallization (CLC) technology"
  Nobuo Sasaki, Akito Hara, Fumiyo Takeuchi, Katsuyuki Suga, Michiko Takei, Kenichi Yoshino, Mitsuru Chida: IEICE Transactions on Electronics, Information and Communication Engineers Vol. J85-C (2002) 601.

Journal commentaries (4 entries)

• High-performance and high-function polycrystalline silicon thin-film transistors on glass substrates
  Akito Hara, Applied Physics (Japan Society of Applied Physics) 86 (2017) 962.

Three other results (see researchmap)

Invited lectures given since the establishment of the research lab (April 2006) (15 lectures)

• Low temperature poly-Ge TFTs on glass and plastic substrates
  Akito Hara, Hitoshi Suzuki, Sho Suzuki, Yuto Ito, Daiki Goshima, Akito Kurihara
  2024 Int. Conf. on SOLID STATE DEVICES AND MATERIALS (September 4, 2024) Himeji.
• "Double-gate thin-film transistor on a glass substrate"
  Akito Hara, Kaisei Nomura, Teruo Nagayoshi, Seiei Nitta, Sho Suzuki, Yuto Ito: IEICE Technical Report SDM2023-16, OME2023-16 (2023-04) (April 2023) Okinawa
• (Digital Presentation) "Evaluation of Polycrystalline-Si1-XGex Thin-Film Transistors Grown Laterally on a Glass Substrate Using a Continuous-Wave Laser"
  Akito Hara, Tatsuya Sagawa, Kotaro Kusunoki, and Kuninor Kitahara, 242nd ECS Meeting H02-1264 (Oct. 2022) USA.
• "Enhancing the performance and functionality of Group IV thin-film transistors"
  Akito Hara, Daiki Utsumi, Naoki Nishiguchi, Ryo Miyazaki: IEICE Silicon Materials and Devices Research Committee Vol.118 No.1, SDM 2018-5 (April 2018) Okinawa.
• "Four-terminal low-temperature polycrystalline silicon thin-film transistor on a glass substrate"
  Akihito Hara: The 14th Thin Film Materials and Devices Research Meeting (October 2017), Ryukoku University.
• "Four-Terminal LTPS TFTs on a Glass Substrate"
  Akito Hara and Hiroki Ohsawa: The 17th International Meeting on Information Display, C43-1 (Aug. 2017) Korea.
• "Self-Aligned Four-Terminal Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Continuous-Wave Laser Lateral Crystallization"
  Akito Hara and Hiroki Ohsawa: ECS PRIME 2016, Thin Film Transistors 13, 2115 (Oct. 2016) USA.
• "Prospect of Low-Temperature Poly-Si, Poly-SiGe, Poly-Ge TFTs on Glass Substrate"
  Akito Hara, Tatsuya Meguro, Yuya Nishimura, Syota Nibe, Hiroki Ohsawa, Internationl Display Workshops, AMD 7-2 (Dec, 2015) Japan.
• "High-performance and high-functionality thin-film transistors using polycrystalline silicon thin films formed by laser annealing."
  Akihito Hara: Japan Surface Science Society Chubu Branch Research Meeting (November 2015), Shizuoka University.
• "High Performance Sputtered High-k CLC LTPS TFTs on Glass Substrate"
  Akito Hara and Tatsuya Meguro: The 15th International Meeting on Information Display, 22-2 (Aug. 2015) Korea.
• "High Performance Top Gate and Double Gate CLC LT Poly-Si TFTs on Glass Substrate"
  A. Hara, T. Meguro, S. Sasaki, H. Ohsawa: Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors V (Jun. 2015) USA.
• “High-Performance CLC LT Poly-Si TFTs on Glass Substrate”
  Akito Hara: The 14th International Meeting on Information Display, 38-2 (Aug. 2014) Korea.
• "High-performance low-temperature poly-Si TFTs on glass using large-particle-grain thin-film poly-Si"
  Akito Hara, Shinya Kamo, Shun Sasaki, Tatsuya Meguro, Akira Sato, Kuniki Kitahara: IEICE Silicon Materials and Devices Research Committee Vol.114, No.1 (SDM2014-10, OME2014-10) (April 2014)
• "Improving the quality of silicon thin films on glass and their application in devices"
  Akito Hara, Kuniki Kitahara: 60th Spring Meeting of the Japan Society of Applied Physics Symposium (March 2013, Kanagawa Institute of Technology) 29P-B8-5.
• "Growth of Si and SiGe thin films on glass substrates by continuous-wave laser transverse crystallization method"
  Kuniki Kitahara, Akito Hara: IEICE Silicon Materials and Devices Research Committee Vol.112 No.18 (SDM2012 1-18) (April 2012, Okinawa) p.21.

Academic conference presentation awards and other awards since the establishment of the research lab (April 2006) (13 items)

• 22nd Thin Film Materials and Devices Research Meeting Best Paper Award (2025)
  "CMOS inverter using polycrystalline germanium thin-film transistors on a flexible plastic substrate"
  Yoshito Kurihara, Akito Hara
• Tohoku Region Young Researchers' Research Presentation Meeting Outstanding Presentation Award (2025)
  "High-k four-terminal vertical poly-Si thin-film transistor for LSI on glass substrates"
  Daiki Shoko, Yasushi Suzuki, Akito Hara
• Tohoku Region Young Researchers' Research Presentation Meeting Outstanding Presentation Award (2024)
  "Double-gate polycrystalline germanium thin-film transistor on plastic bonded to a glass substrate"
  Yoshito Kurihara, Sho Suzuki, Akito Hara
• Tohoku Region Young Researchers' Research Presentation Meeting Outstanding Presentation Award (2022)
  Self-matched double-gate Cu-MIC n-channel polycrystalline germanium thin-film transistor on a glass substrate
  Sho Suzuki, Keigo Tomizuka, Akito Hara
• Tohoku Region Young Researchers' Research Presentation Meeting Outstanding Presentation Award (2019)
  "Development of double-gate polyGeSn thin-film transistors on plastic"
  Naoki Takeda, Akito Hara
• IEICE Tohoku Branch Student Outstanding Presentation Award (2018)
  "Cu-MIC polycrystalline germanium thin-film transistors on plastic"
  Taiki Utsumi, Akito Hara
• 21st Japan Society of Applied Physics Tohoku Branch Presentation Encouragement Award (2016)
  "Study of CMOS inverters using self-aligned four-terminal planar metal double-gate low-temperature poly-Si TFTs on a glass substrate"
  Hiroki Osawa, Akito Hara
• Download Ranking #4 - November 2014
  (Invited Paper) "Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors for System-on-Glass"
  Akito HARA, Shinya KAMO, Tadashi SATO: IEICE TRANSACTIONS on Electronics E97-C (2014) 1048.
• Student Derby
  “Self-Aligned Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate”
  S. Sasaki, H. Ogata, A. Hara: THE 20ST INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES — TFT Technologies and FPD Materials —, 2013, 8-3.
• Outstanding Poster Paper Award
  “Lateral Large-Grained Low-Temperature Poly-Si1-xGex TFTs on Glass Substrate”
  Y. Okabe, K. Kondo, K. Hirose, J. Suzuki, K. Kitahara, A. Hara: International Display Workshop (2010) AMDp-46L.
• Top 20 Most Downloaded Articles — January 2010
  "Getting in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate"
  A. Hara and T. Sato: Jpn. J. Appl. Phys. 49 (2010) 010203.
• 14th Japan Society of Applied Physics Tohoku Branch Presentation Encouragement Award (2009)
  "Self-aligned metal double-gate low-temperature poly-Si TFTs on glass"
  Akira Sato, Yasuyuki Sato, Kenichi Okuda, Kenta Hirose, Kuniki Kitahara, Akito Hara
• Outstanding Poster Paper Award
  “Dehydrogenation and Lateral Crystallization of Nanocrystalline Silicon Film Using Solid-State Continuous-Wave Green Laser”
  T. Sato, W. Umezu, K. Yamamoto, A. Hara, K. Kitahara: International Display Workshop (2008) AMDp4-1.

External funding received since the establishment of the research lab (April 2006) (Principal Investigator only) (13 projects)

• Grants-in-Aid for Scientific Research (Category B) (FY2007-FY2009)
• Japan Science and Technology Agency Seed Discovery Test (FY2007)
• Research grant from the Materials Science and Technology Promotion Foundation (FY2007)
• Grants-in-Aid for Scientific Research (C) (FY2010-FY2012)
• Subsidies for Research Equipment Improvement at Private Universities, etc., FY2010
• Grants-in-Aid for Scientific Research (C) (FY2013-FY2015)
• Japan Science and Technology Agency A-STEP (2013)
• Grants-in-Aid for Scientific Research (C) (FY2016-FY2018)
• Ikegaya Science and Technology Foundation Research Grant (FY2017)
• Grants-in-Aid for Scientific Research (C) (FY2019-FY2021)
• Grants-in-Aid for Scientific Research (C) (FY2022-FY2024)
• Grants-in-Aid for Scientific Research (C) (FY2025-FY2027)
• Toshiba Device & Storage Corporation Academic Encouragement Program (FY2025)

Research facilities owned: [Semiconductor device laboratory (cleanroom)]

Plasma CVD systems (2 units), sputtering systems (3 units), electron beam deposition system (1 unit), vacuum deposition system (1 unit), small, simple sputtering deposition systems (2 units), reactive ion etching system (1 unit), laser crystallization system (1 unit), heat treatment equipment (3 units), mask aligners (2 units), spinners (2 units), oven (1 unit), fume hood (1 unit), pure water production system (1 unit), chemical mechanical polishing (CMP) system (1 unit), cylinder cabinet (1 set), gas abatement system (1 set), semiconductor measurement equipment, CV measurement equipment, 2D device simulator (Silvaco), rapid thermal annealing (RTA)